Semiconductor Pumps

Even in this business our IWAKI pumps are world wide appreciated and used. The range contains bellow pumps, pulsation dampener and metering pumps. Wet-Bench processes, resist-saving dispensing systems, slurry applications as well as spiking are the range of application for IWAKI's specialists.

Semiconductor Pumps Features

For more details, please choose one of your product.

Series	Max. capacity	Max. pressure (bar)	Max. stroke speed (spm)
FS	100 l/min	5	240
FW/-H	80 l/min	4.5	120
FA	40 l/min	4.5	150
CFD	240 ml/min	0.5	30

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